In-situ investigation of ion implantation processes by thermal wave analysis
نویسندگان
چکیده
High-fluence N+-implantation in steel is monitored by use of nondestructive and contactless photothermal measurements during the implantation process. The modulated reflectivity is correlated with the results of Knoop hardness testing. On-line measurements on the steel surface and direct ion beam monitoring from the back side of a monitor sample are demonstrated. The maximum of the ion implantation induced hardness is strongly correlated with the phase transition indicated by the thermomodulated dielectric function.
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